Assignee
CYMER INC
US·377 granted patents·22 pending applications·18,273 citations·filing 1994–2013
Top patents by PatentIndex Score
399 records- 0199US7196342B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2005·Granted Mar 27, 2007·284 cites·9 claims
- 0299US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0399US6549551B2Injection seeded laser with precise timing controlCYMER INC·Filed 2001·Granted Apr 15, 2003·186 cites·11 claims
- 0499US6067311AExcimer laser with pulse multiplierCYMER INC·Filed 1998·Granted May 23, 2000·224 cites·13 claims
- 0599US6005879APulse energy control for excimer laserCYMER INC·Filed 1998·Granted Dec 21, 1999·231 cites·13 claims
- 0699US5978394AWavelength system for an excimer laserCYMER INC·Filed 1998·Granted Nov 2, 1999·223 cites·13 claims
- 0798US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0898US7655925B2Gas management system for a laser-produced-plasma EUV light sourceCYMER INC·Filed 2007·Granted Feb 2, 2010·43 cites·20 claims
- 0998US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 1098US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 1198US7405416B2Method and apparatus for EUV plasma source target deliveryCYMER INC·Filed 2005·Granted Jul 29, 2008·118 cites·10 claims
- 1298US7372056B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2005·Granted May 13, 2008·109 cites·21 claims
- 1398US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 1498US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 1598US6566667B1Plasma focus light source with improved pulse power systemCYMER INC·Filed 2000·Granted May 20, 2003·185 cites·22 claims
- 1698US6535531B1Gas discharge laser with pulse multiplierCYMER INC·Filed 2001·Granted Mar 18, 2003·166 cites·9 claims
- 1798US6208675B1Blower assembly for a pulsed laser system incorporating ceramic bearingsCYMER INC·Filed 1998·Granted Mar 27, 2001·193 cites·25 claims
- 1898US6208674B1Laser chamber with fully integrated electrode feedthrough main insulatorCYMER INC·Filed 1999·Granted Mar 27, 2001·187 cites·24 claims
- 1998US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 2098US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 2198US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 2298US5856991AVery narrow band laserCYMER INC·Filed 1997·Granted Jan 5, 1999·198 cites·15 claims
- 2398US5852621APulse laser with pulse energy trimmerCYMER INC·Filed 1997·Granted Dec 22, 1998·196 cites·6 claims
- 2498US5771258AAerodynamic chamber design for high pulse repetition rate excimer lasersCYMER INC·Filed 1997·Granted Jun 23, 1998·187 cites·14 claims
- 2598US5763930APlasma focus high energy photon sourceCYMER INC·Filed 1997·Granted Jun 9, 1998·192 cites·6 claims
- 2698US5729562APulse power generating circuit with energy recoveryCYMER INC·Filed 1996·Granted Mar 17, 1998·241 cites·64 claims
- 2797US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 2897US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 2997US7643529B2Laser systemCYMER INC·Filed 2007·Granted Jan 5, 2010·35 cites·15 claims
- 3097US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 3197US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 3297US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 3397US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 3497US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 3597US6493374B1Smart laser with fast deformable gratingCYMER INC·Filed 2000·Granted Dec 10, 2002·90 cites·22 claims
- 3697US6477193B2Extreme repetition rate gas discharge laser with improved blower motorCYMER INC·Filed 2000·Granted Nov 5, 2002·155 cites·28 claims
- 3797US6414979B2Gas discharge laser with blade-dielectric electrodeCYMER INC·Filed 2001·Granted Jul 2, 2002·173 cites·17 claims
- 3897US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 3997US6240117B1Fluorine control system with fluorine monitorCYMER INC·Filed 1998·Granted May 29, 2001·205 cites·39 claims
- 4097US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 4197US6094448AGrating assembly with bi-directional bandwidth controlCYMER INC·Filed 1999·Granted Jul 25, 2000·194 cites·8 claims
- 4297US6016325AMagnetic modulator voltage and temperature timing compensation circuitCYMER INC·Filed 1998·Granted Jan 18, 2000·179 cites·11 claims
- 4396US8680495B1Extreme ultraviolet light sourceCYMER INC·Filed 2013·Granted Mar 25, 2014·17 cites·18 claims
- 4496US7920616B2Laser systemCYMER INC·Filed 2007·Granted Apr 5, 2011·32 cites·17 claims
- 4596US7899095B2Laser lithography system with improved bandwidth controlCYMER INC·Filed 2008·Granted Mar 1, 2011·23 cites·20 claims
- 4696US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 4796US7715459B2Laser systemCYMER INC·Filed 2007·Granted May 11, 2010·36 cites·30 claims
- 4896US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 4996US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 5096US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
Showing the top 50 of 399 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →