Assignee
DALSA SEMICONDUCTOR INC
CA·35 granted patents·1 pending application·963 citations·filing 2001–2010
Top patents by PatentIndex Score
36 records- 0198US6635509B1Wafer-level MEMS packagingDALSA SEMICONDUCTOR INC·Filed 2002·Granted Oct 21, 2003·297 cites·17 claims
- 0295US7365016B2Anhydrous HF release of process for MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2005·Granted Apr 29, 2008·204 cites·23 claims
- 0394US7160752B2Fabrication of advanced silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2005·Granted Jan 9, 2007·33 cites·23 claims
- 0488US6902656B2Fabrication of microstructures with vacuum-sealed cavityDALSA SEMICONDUCTOR INC·Filed 2002·Granted Jun 7, 2005·46 cites·29 claims
- 0587US7144750B2Method of fabricating silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2003·Granted Dec 5, 2006·44 cites·7 claims
- 0687US6602791B2Manufacture of integrated fluidic devicesDALSA SEMICONDUCTOR INC·Filed 2001·Granted Aug 5, 2003·101 cites·42 claims
- 0783US7138293B2Wafer level packaging technique for microdevicesDALSA SEMICONDUCTOR INC·Filed 2002·Granted Nov 21, 2006·54 cites·55 claims
- 0878US6656528B2Method of making specular infrared mirrors for use in optical devicesDALSA SEMICONDUCTOR INC·Filed 2001·Granted Dec 2, 2003·19 cites·17 claims
- 0977US7439093B2Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etchDALSA SEMICONDUCTOR INC·Filed 2005·Granted Oct 21, 2008·14 cites·20 claims
- 1074US7614253B2Method of reducing stress-induced mechanical problems in optical componentsDALSA SEMICONDUCTOR INC·Filed 2006·Granted Nov 10, 2009·7 cites·6 claims
- 1174US6896821B2Fabrication of MEMS devices with spin-on glassDALSA SEMICONDUCTOR INC·Filed 2002·Granted May 24, 2005·14 cites·15 claims
- 1273US7459329B2Method of fabricating silicon-based MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2005·Granted Dec 2, 2008·4 cites·16 claims
- 1372US6555441B2Method of aligning structures on opposite sides of a waferDALSA SEMICONDUCTOR INC·Filed 2001·Granted Apr 29, 2003·17 cites·24 claims
- 1470US7682860B2Protection capsule for MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2007·Granted Mar 23, 2010·7 cites·16 claims
- 1568US7807550B2Method of making MEMS wafersDALSA SEMICONDUCTOR INC·Filed 2006·Granted Oct 5, 2010·6 cites·5 claims
- 1668US7291513B2Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgyDALSA SEMICONDUCTOR INC·Filed 2004·Granted Nov 6, 2007·19 cites·22 claims
- 1767US7579622B2Fabrication of MEMS devices with spin-on glassDALSA SEMICONDUCTOR INC·Filed 2005·Granted Aug 25, 2009·2 cites·10 claims
- 1862US7799376B2Method of controlling film stress in MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2007·Granted Sep 21, 2010·0 cites·9 claims
- 1962US6686214B2Method of aligning a photolithographic mask to a crystal planeDALSA SEMICONDUCTOR INC·Filed 2001·Granted Feb 3, 2004·17 cites·10 claims
- 2062US6537623B2Manufacture of silica waveguides with minimal absorptionDALSA SEMICONDUCTOR INC·Filed 2001·Granted Mar 25, 2003·8 cites·23 claims
- 2161US6749893B2Method of preventing cracking in optical quality silica layersDALSA SEMICONDUCTOR INC·Filed 2002·Granted Jun 15, 2004·9 cites·24 claims
- 2254US6770213B2Method of inspecting an anisotropic etch in a microstructureDALSA SEMICONDUCTOR INC·Filed 2001·Granted Aug 3, 2004·7 cites·18 claims
- 2354US6716476B2Method of depositing an optical quality silica film by PECVDDALSA SEMICONDUCTOR INC·Filed 2001·Granted Apr 6, 2004·5 cites·20 claims
- 2451US7037745B2Method of making electrical connections to hermetically sealed MEMS devicesDALSA SEMICONDUCTOR INC·Filed 2004·Granted May 2, 2006·5 cites·23 claims
- 2550US6887514B2Method of depositing optical filmsDALSA SEMICONDUCTOR INC·Filed 2001·Granted May 3, 2005·2 cites·19 claims
- 2649US7799656B2Microchannels for BioMEMS devicesDALSA SEMICONDUCTOR INC·Filed 2008·Granted Sep 21, 2010·0 cites·16 claims
- 2746US6937806B2Method of making photonic devices with SOG interlayerDALSA SEMICONDUCTOR INC·Filed 2002·Granted Aug 30, 2005·1 cites·33 claims
- 2844US7101754B2Titanium silicate films with high dielectric constantDALSA SEMICONDUCTOR INC·Filed 2004·Granted Sep 5, 2006·1 cites·22 claims
- 2943US6598610B2Method of depositing a thick dielectric filmDALSA SEMICONDUCTOR INC·Filed 2001·Granted Jul 29, 2003·4 cites·13 claims
- 3043US6573133B2Method of forming spacers in CMOS devicesDALSA SEMICONDUCTOR INC·Filed 2001·Granted Jun 3, 2003·5 cites·8 claims
- 3141US7927904B2Method of making BIOMEMS devicesDALSA SEMICONDUCTOR INC·Filed 2010·Granted Apr 19, 2011·0 cites·14 claims
- 3241US7341905B2Method of making high-voltage bipolar/CMOS/DMOS (BCD) devicesDALSA SEMICONDUCTOR INC·Filed 2004·Granted Mar 11, 2008·2 cites·4 claims
- 3340US6849491B2Method of making high-voltage bipolar/CMOS/DMOS (BCD) devicesDALSA SEMICONDUCTOR INC·Filed 2001·Granted Feb 1, 2005·2 cites·11 claims
- 3439US6724967B2Method of making a functional device with deposited layers subject to high temperature annealDALSA SEMICONDUCTOR INC·Filed 2001·Granted Apr 20, 2004·7 cites·11 claims
- 3538US2009242512A1Deep reactive ion etchingDALSA SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 3627US6833282B2Method of forming an optical sensor device having a composite sandwich structure of alternating titanium and titanium nitride layersDALSA SEMICONDUCTOR INC·Filed 2003·Granted Dec 21, 2004·0 cites·8 claims
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