Assignee
DANIELS STEPHEN
IE·2 granted patents·17 citations·filing 2007–2010
Top patents by PatentIndex Score
2 records- 0185US9842726B2Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrateDANIELS STEPHEN·Filed 2010·Granted Dec 12, 2017·13 cites·27 claims
- 0268US8242789B2Plasma system and measurement methodDANIELS STEPHEN·Filed 2007·Granted Aug 14, 2012·4 cites·24 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →