Assignee
DASAN C & I CO LTD
KR·3 granted patents·117 citations·filing 1997–2000
Top patents by PatentIndex Score
3 records- 0179US6449873B1Apparatus and method for dry cleaning of substrates using clustersDASAN C & I CO LTD·Filed 2000·Granted Sep 17, 2002·35 cites·33 claims
- 0271US5833096AWater dispenserDASAN C & I CO LTD·Filed 1997·Granted Nov 10, 1998·62 cites·9 claims
- 0347US6279650B1Temperature-Humidity controller for semiconductor equipment and controlling method thereofDASAN C & I CO LTD·Filed 1999·Granted Aug 28, 2001·20 cites·1 claims
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