Assignee
DAVIS MATTHEW FENTON
US·1 granted patent·3 pending applications·23 citations·filing 2003–2012
Top patents by PatentIndex Score
4 records- 0178US8257546B2Method and system for monitoring an etch processDAVIS MATTHEW FENTON·Filed 2003·Granted Sep 4, 2012·23 cites·37 claims
- 0246US2012291952A1Method and system for monitoring an etch processDAVIS MATTHEW FENTON·Filed 2012·Application pending·0 cites
- 0344US2009316749A1Substrate temperature measurement by infrared transmission in an etch processDAVIS MATTHEW FENTON·Filed 2008·Application pending·0 cites
- 0440US2009158265A1Implementation of advanced endpoint functions within third party software by using a plug-in approachDAVIS MATTHEW FENTON·Filed 2007·Application pending·0 cites
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