Assignee
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
NL·5 granted patents·1 pending application·1 citations·filing 2007–2011
Top patents by PatentIndex Score
6 records- 0167US9158206B2Lithographic apparatus and contamination removal or prevention methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2011·Granted Oct 13, 2015·1 cites·13 claims
- 0254US2011292359A1Cleaning device and a lithographic apparatus cleaning methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2011·Application pending·0 cites
- 0353US9013672B2Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2007·Granted Apr 21, 2015·0 cites·31 claims
- 0450US8339572B2Lithographic apparatus and device manufacturing methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2009·Granted Dec 25, 2012·0 cites·29 claims
- 0549US9289802B2Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatusDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2008·Granted Mar 22, 2016·0 cites·36 claims
- 0646US8947629B2Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2008·Granted Feb 3, 2015·0 cites·46 claims
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