Assignee
DE JONG HENDRIK JAN
NL·4 granted patents·295 citations·filing 2010–2011
Top patents by PatentIndex Score
4 records- 0198US9460954B2Method of clamping a substrate and clamp preparation unit using capillary clamping forceDE JONG HENDRIK JAN·Filed 2010·Granted Oct 4, 2016·283 cites·37 claims
- 0288US8436324B2Preparation unit for lithography machineDE JONG HENDRIK JAN·Filed 2010·Granted May 7, 2013·8 cites·23 claims
- 0368US8514370B2Substrate support structure, clamp preparation unit, and lithography systemDE JONG HENDRIK JAN·Filed 2011·Granted Aug 20, 2013·2 cites·21 claims
- 0467US8991330B2Substrate support structure, clamp preparation unit, and lithography systemDE JONG HENDRIK JAN·Filed 2010·Granted Mar 31, 2015·2 cites·21 claims
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