Assignee
DEGUENTHER MARKUS
DE·6 granted patents·1 pending application·19 citations·filing 2004–2011
Top patents by PatentIndex Score
7 records- 0187US8705005B2Microlithographic illumination systemDEGUENTHER MARKUS·Filed 2008·Granted Apr 22, 2014·9 cites·49 claims
- 0283US8854604B2Microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2011·Granted Oct 7, 2014·4 cites·22 claims
- 0376US8755031B2Illumination system of a microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2011·Granted Jun 17, 2014·2 cites·7 claims
- 0468US9007563B2Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2010·Granted Apr 14, 2015·1 cites·28 claims
- 0562US8773639B2Illumination system of a microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2009·Granted Jul 8, 2014·2 cites·21 claims
- 0662US8416390B2Illumination system for illuminating a mask in a microlithographic exposure apparatusDEGUENTHER MARKUS·Filed 2009·Granted Apr 9, 2013·1 cites·31 claims
- 0739US2006268251A1Illumination system for a microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2004·Application pending·0 cites
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