Assignee
DELGADO GILDARDO
US·3 granted patents·46 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0196US8414688B1Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shippingDELGADO GILDARDO·Filed 2011·Granted Apr 9, 2013·41 cites·20 claims
- 0278US9335279B2Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspectionDELGADO GILDARDO·Filed 2012·Granted May 10, 2016·4 cites·6 claims
- 0364US9335637B2Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablationDELGADO GILDARDO·Filed 2011·Granted May 10, 2016·1 cites·18 claims
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