Assignee
DEN BOEF ARIE JEFFREY
NL·24 granted patents·366 citations·filing 2007–2012
Top patents by PatentIndex Score
24 records- 0198US8823922B2Overlay measurement apparatus, lithographic apparatus and device manufacturing method using such overlay measurement apparatusDEN BOEF ARIE JEFFREY·Filed 2009·Granted Sep 2, 2014·62 cites·16 claims
- 0298US8339595B2Diffraction based overlay metrology tool and methodDEN BOEF ARIE JEFFREY·Filed 2008·Granted Dec 25, 2012·84 cites·21 claims
- 0397US9110385B2Metrology method and apparatus, lithographic apparatus, and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2009·Granted Aug 18, 2015·30 cites·18 claims
- 0496US8767183B2Method of overlay measurement, lithographic apparatus, inspection apparatus, processing apparatus and lithographic processing cellDEN BOEF ARIE JEFFREY·Filed 2010·Granted Jul 1, 2014·16 cites·15 claims
- 0596US8593646B2Measuring method, measuring apparatus, lithographic apparatus and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Nov 26, 2013·30 cites·18 claims
- 0695US8842293B2Level sensor arrangement for lithographic apparatus and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 23, 2014·16 cites·15 claims
- 0794US8830447B2Inspection method for lithographyDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 9, 2014·10 cites·20 claims
- 0894US8248608B2Imprint lithographyDEN BOEF ARIE JEFFREY·Filed 2010·Granted Aug 21, 2012·10 cites·21 claims
- 0993US8508736B2Tunable wavelength illumination systemDEN BOEF ARIE JEFFREY·Filed 2010·Granted Aug 13, 2013·9 cites·21 claims
- 1092US8908147B2Method and apparatus for determining an overlay errorDEN BOEF ARIE JEFFREY·Filed 2011·Granted Dec 9, 2014·9 cites·20 claims
- 1192US8189195B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2007·Granted May 29, 2012·15 cites·33 claims
- 1291US8529823B2Imprint lithographyDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 10, 2013·7 cites·20 claims
- 1390US9704810B2Method and apparatus for determining an overlay errorDEN BOEF ARIE JEFFREY·Filed 2012·Granted Jul 11, 2017·12 cites·20 claims
- 1487US9303978B2Optical apparatus, method of scanning, lithographic apparatus and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Apr 5, 2016·7 cites·14 claims
- 1587US8868387B2Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatusDEN BOEF ARIE JEFFREY·Filed 2008·Granted Oct 21, 2014·28 cites·40 claims
- 1684US8830472B2Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatusDEN BOEF ARIE JEFFREY·Filed 2009·Granted Sep 9, 2014·8 cites·15 claims
- 1782US8319968B2Imprint lithographyDEN BOEF ARIE JEFFREY·Filed 2009·Granted Nov 27, 2012·6 cites·20 claims
- 1879US9081302B2Inspection apparatus and method, lithographic apparatus and lithographic processing cellDEN BOEF ARIE JEFFREY·Filed 2011·Granted Jul 14, 2015·3 cites·20 claims
- 1971US8120001B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2009·Granted Feb 21, 2012·2 cites·6 claims
- 2068US8264686B2Lithographic apparatus and device manufacturing method using overlay measurementDEN BOEF ARIE JEFFREY·Filed 2009·Granted Sep 11, 2012·2 cites·15 claims
- 2151US9535322B2Imprint lithographyDEN BOEF ARIE JEFFREY·Filed 2011·Granted Jan 3, 2017·0 cites·21 claims
- 2246US8830455B2Inspection method and apparatusDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 9, 2014·0 cites·19 claims
- 2343US8488107B2Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection unitsDEN BOEF ARIE JEFFREY·Filed 2011·Granted Jul 16, 2013·0 cites·16 claims
- 2439US8675210B2Level sensor, lithographic apparatus, and substrate surface positioning methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Mar 18, 2014·0 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when DEN BOEF ARIE JEFFREY files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →