Assignee
DENTON VACUUM L L C
US·1 granted patent·2 pending applications·2 citations·filing 2012–2018
Top patents by PatentIndex Score
3 records- 0180US10815570B2Linearized energetic radio-frequency plasma ion sourceDENTON VACUUM L L C·Filed 2018·Granted Oct 27, 2020·2 cites·25 claims
- 0245US2015110949A1Vacuum In-Situ Thin Layer Color Deposition System and MethodDENTON VACUUM L L C·Filed 2014·Application pending·0 cites
- 0332US2013084147A1Semiconductor wafer treatment systemDENTON VACUUM L L C·Filed 2012·Application pending·0 cites
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