Assignee
DICKEY ERIC R
US·11 granted patents·3 pending applications·573 citations·filing 2007–2016
Top patents by PatentIndex Score
14 records- 0198US8187679B2Radical-enhanced atomic layer deposition system and methodDICKEY ERIC R·Filed 2007·Granted May 29, 2012·540 cites·20 claims
- 0294US8137464B2Atomic layer deposition system for coating flexible substratesDICKEY ERIC R·Filed 2007·Granted Mar 20, 2012·13 cites·22 claims
- 0393US8202366B2Atomic layer deposition system utilizing multiple precursor zones for coating flexible substratesDICKEY ERIC R·Filed 2010·Granted Jun 19, 2012·6 cites·18 claims
- 0489US9469901B2Atomic layer deposition method utilizing multiple precursor zones for coating flexible substratesDICKEY ERIC R·Filed 2012·Granted Oct 18, 2016·3 cites·18 claims
- 0588US8637117B2Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition systemDICKEY ERIC R·Filed 2010·Granted Jan 28, 2014·4 cites·22 claims
- 0686US9238868B2Atomic layer deposition method for coating flexible substratesDICKEY ERIC R·Filed 2012·Granted Jan 19, 2016·2 cites·43 claims
- 0776US9435028B2Plasma generation for thin film deposition on flexible substratesDICKEY ERIC R·Filed 2013·Granted Sep 6, 2016·1 cites·18 claims
- 0874US9263359B2Mixed metal-silicon-oxide barriersDICKEY ERIC R·Filed 2014·Granted Feb 16, 2016·4 cites·20 claims
- 0953US2013177760A1Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier filmsDICKEY ERIC R·Filed 2012·Application pending·0 cites
- 1051US9297076B2Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film depositionDICKEY ERIC R·Filed 2011·Granted Mar 29, 2016·0 cites·37 claims
- 1149US9133546B1Electrically- and chemically-active adlayers for plasma electrodesDICKEY ERIC R·Filed 2014·Granted Sep 15, 2015·0 cites·29 claims
- 1249US8637123B2Oxygen radical generation for radical-enhanced thin film depositionDICKEY ERIC R·Filed 2010·Granted Jan 28, 2014·0 cites·25 claims
- 1340US2017025635A1Mixed metal-silicon-oxide barriersDICKEY ERIC R·Filed 2016·Application pending·0 cites
- 1429US2017088951A1Deposition of high-quality mixed oxide barrier filmsDICKEY ERIC R·Filed 2015·Application pending·0 cites
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