Assignee
DIECKMANN NILS
DE·4 granted patents·1 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0161US8488104B2Projection objective with diaphragmsDIECKMANN NILS·Filed 2011·Granted Jul 16, 2013·1 cites·20 claims
- 0252US8169594B2Illumination system of a microlithographic projection exposure apparatusDIECKMANN NILS·Filed 2009·Granted May 1, 2012·0 cites·29 claims
- 0350US9116441B2Illumination system of a microlithographic projection exposure apparatusDIECKMANN NILS·Filed 2012·Granted Aug 25, 2015·0 cites·20 claims
- 0444US9274435B2Illumination system or projection objective of a microlithographic projection exposure apparatusDIECKMANN NILS·Filed 2009·Granted Mar 1, 2016·0 cites·36 claims
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