Assignee
DIERICHS MARCEL MATHIJS THEODORE MARIE
NL·6 granted patents·27 citations·filing 2003–2011
Top patents by PatentIndex Score
6 records- 0195US8629971B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2010·Granted Jan 14, 2014·9 cites·20 claims
- 0293US9025127B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted May 5, 2015·6 cites·22 claims
- 0393US8953144B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted Feb 10, 2015·6 cites·22 claims
- 0462US8252487B2Device manufacturing method and mask for use thereinDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2003·Granted Aug 28, 2012·6 cites·14 claims
- 0552US8279405B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2010·Granted Oct 2, 2012·0 cites·11 claims
- 0639US9188881B2Lithographic apparatus and method for reducing stray radiationDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2010·Granted Nov 17, 2015·0 cites·14 claims
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