Assignee
DINGER UDO
DE·4 granted patents·22 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0188US9411241B2Facet mirror for use in a projection exposure apparatus for microlithographyDINGER UDO·Filed 2010·Granted Aug 9, 2016·11 cites·27 claims
- 0279US8710471B2Projection illumination system for EUV microlithographyDINGER UDO·Filed 2010·Granted Apr 29, 2014·3 cites·28 claims
- 0377US8934085B2Bundle-guiding optical collector for collecting the emission of a radiation sourceDINGER UDO·Filed 2010·Granted Jan 13, 2015·7 cites·22 claims
- 0455US8253927B2Optical element with multiple primary light sourcesDINGER UDO·Filed 2009·Granted Aug 28, 2012·1 cites·21 claims
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