Assignee
DIRECKS DANIEL JOZEF MARIA
NL·4 granted patents·24 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0187US8421993B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Apr 16, 2013·14 cites·20 claims
- 0286US8259283B2Immersion lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Sep 4, 2012·10 cites·24 claims
- 0355US9383654B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Jul 5, 2016·0 cites·23 claims
- 0439US9618835B2Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressureDIRECKS DANIEL JOZEF MARIA·Filed 2011·Granted Apr 11, 2017·0 cites·20 claims
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