Assignee
DIRKSEN PETER
BE·6 granted patents·2 pending applications·105 citations·filing 2003–2012
Top patents by PatentIndex Score
8 records- 0192US8327521B2Method for production and using a capacitive micro-machined ultrasonic transducerDIRKSEN PETER·Filed 2008·Granted Dec 11, 2012·87 cites·22 claims
- 0284US9550211B2Temperature compensation in a CMUT deviceDIRKSEN PETER·Filed 2012·Granted Jan 24, 2017·11 cites·16 claims
- 0383US10092270B2Pre-collapsed CMUT with mechanical collapse retentionDIRKSEN PETER·Filed 2010·Granted Oct 9, 2018·6 cites·20 claims
- 0455US9177468B2Ultrasonic transmission / reception for electromagnetic transmission receptionDIRKSEN PETER·Filed 2009·Granted Nov 3, 2015·0 cites·14 claims
- 0555US8890076B2Bolometer and method of manufacturing the sameDIRKSEN PETER·Filed 2012·Granted Nov 18, 2014·1 cites·15 claims
- 0639US2012039522A1Mask inspection apparatus and methodDIRKSEN PETER·Filed 2005·Application pending·0 cites
- 0738US2006215140A1Method of measuring the performance of an illumination systemDIRKSEN PETER·Filed 2003·Application pending·0 cites
- 0834US8067147B2Removable pellicle for immersion lithographyDIRKSEN PETER·Filed 2004·Granted Nov 29, 2011·0 cites·17 claims
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