Assignee

DONBU ELECTRONICS CO LTD

KR·2 granted patents·2 citations·filing 2004–2004

Technology mixC23F1 G03F1 H10D1 H10P1

Top patents by PatentIndex Score

2 records

0148US7491648B2Method of patterning a photoresist film using a lithographicDONBU ELECTRONICS CO LTD·Filed 2004·Granted Feb 17, 2009·2 cites·8 claims
0234US7365020B2Method for etching upper metal of capacitatorDONBU ELECTRONICS CO LTD·Filed 2004·Granted Apr 29, 2008·0 cites·6 claims

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