Individual holder
DUNN SHANNON W
US·5 granted patents·22 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0189US8764999B2Sidewall image transfer pitch doubling and inline critical dimension slimmingDUNN SHANNON W·Filed 2011·Granted Jul 1, 2014·18 cites·23 claims
- 0276US8647817B2Vapor treatment process for pattern smoothing and inline critical dimension slimmingDUNN SHANNON W·Filed 2012·Granted Feb 11, 2014·3 cites·20 claims
- 0360US8940475B2Double patterning with inline critical dimension slimmingDUNN SHANNON W·Filed 2011·Granted Jan 27, 2015·1 cites·18 claims
- 0447US8389206B2High normality solution for removing freeze material in lithographic applicationsDUNN SHANNON W·Filed 2009·Granted Mar 5, 2013·0 cites·18 claims
- 0538US8507190B2Method for preparing alignment mark for multiple patterningDUNN SHANNON W·Filed 2010·Granted Aug 13, 2013·0 cites·19 claims
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