Assignee

EDELBERG ERIK A

US·1 granted patent·1 pending application·22 citations·filing 2005–2009

Technology mixH01J2 H10P2 G03F1 H10W1

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2 records

0190US8475673B2Method and apparatus for high aspect ratio dielectric etchEDELBERG ERIK A·Filed 2009·Granted Jul 2, 2013·22 cites·13 claims
0234US2006228889A1Methods of removing resist from substrates in resist stripping chambersEDELBERG ERIK A·Filed 2005·Application pending·0 cites

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