Assignee

EDWARDS SEMICONDUCTOR SOLUTIONS LLC

US·1 granted patent·1 citations·filing 2022–2022

Technology mixB01F1 C23C1 C30B1 H01L1 H10P1 Y10T1

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0186US11680318B2Vapor delivery device, methods of manufacture and methods of use thereofEDWARDS SEMICONDUCTOR SOLUTIONS LLC·Filed 2022·Granted Jun 20, 2023·1 cites·18 claims

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