Assignee
EDWARDS VACUUM LLC
US·33 granted patents·23 pending applications·29 citations·filing 2015–2023
Top patents by PatentIndex Score
56 records- 0193US11175075B2Systems and methods for warming a cryogenic heat exchanger array, for compact and efficient refrigeration, and for adaptive power managementEDWARDS VACUUM LLC·Filed 2019·Granted Nov 16, 2021·20 cites·12 claims
- 0272US11732931B2Pneumatic drive cryocoolerEDWARDS VACUUM LLC·Filed 2021·Granted Aug 22, 2023·0 cites·18 claims
- 0368US9888526B2Detecting heater failure in a group of electric heaters in a process equipment heating systemEDWARDS VACUUM LLC·Filed 2015·Granted Feb 6, 2018·3 cites·6 claims
- 0467US10900699B2Helium management control systemEDWARDS VACUUM LLC·Filed 2018·Granted Jan 26, 2021·0 cites·18 claims
- 0566US10184689B2Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interruptedEDWARDS VACUUM LLC·Filed 2015·Granted Jan 22, 2019·2 cites·21 claims
- 0665US11215384B2System and method for cryogenic coolingEDWARDS VACUUM LLC·Filed 2018·Granted Jan 4, 2022·0 cites·18 claims
- 0765US11209193B2Pneumatic drive cryocoolerEDWARDS VACUUM LLC·Filed 2019·Granted Dec 28, 2021·0 cites·18 claims
- 0865US2024109029A1Exhaust gas abatement systemEDWARDS VACUUM LLC·Filed 2023·Application pending·0 cites
- 0963US10632399B2Multi-refrigerator high speed cryopumpEDWARDS VACUUM LLC·Filed 2017·Granted Apr 28, 2020·0 cites·15 claims
- 1063US10495079B2Cryopump hybrid frontal arrayEDWARDS VACUUM LLC·Filed 2016·Granted Dec 3, 2019·2 cites·13 claims
- 1162US11466673B2Cryopump with peripheral first and second stage arraysEDWARDS VACUUM LLC·Filed 2018·Granted Oct 11, 2022·1 cites·15 claims
- 1260US2025202332A1Motion converting deviceEDWARDS VACUUM LLC·Filed 2023·Application pending·0 cites
- 1358US12320710B2Vacuum apparatus temperature sensor assemblyEDWARDS VACUUM LLC·Filed 2021·Granted Jun 3, 2025·0 cites·7 claims
- 1458US2025046591A1Ion trap and method for detecting ions in an ion trapEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 1557US12487015B2Semiconductor wafer temperature control apparatusEDWARDS VACUUM LLC·Filed 2021·Granted Dec 2, 2025·0 cites·14 claims
- 1657US11931682B2Waste gas abatement technology for semiconductor processingEDWARDS VACUUM LLC·Filed 2021·Granted Mar 19, 2024·0 cites·13 claims
- 1757US2025180264A1Refrigerant testingEDWARDS VACUUM LLC·Filed 2023·Application pending·0 cites
- 1856US12140131B2Flange for a vacuum apparatusEDWARDS VACUUM LLC·Filed 2021·Granted Nov 12, 2024·0 cites·11 claims
- 1955US11786858B2Liquid filter apparatus for gas/solid separation for semiconductor processesEDWARDS VACUUM LLC·Filed 2020·Granted Oct 17, 2023·0 cites·14 claims
- 2055US2024347350A1In line water scrubber system for semiconductor processingEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 2154US12181191B2Pressure regulated semiconductor wafer cooling apparatus and method and a pressure regulating apparatusEDWARDS VACUUM LLC·Filed 2021·Granted Dec 31, 2024·0 cites·25 claims
- 2254US12140130B2Cryopanel structure for a cryopumpEDWARDS VACUUM LLC·Filed 2021·Granted Nov 12, 2024·0 cites·16 claims
- 2353US12480694B2Connecting and disconnecting a cooling loop from a refrigeration systemEDWARDS VACUUM LLC·Filed 2022·Granted Nov 25, 2025·0 cites·14 claims
- 2453US12180951B2Pump moduleEDWARDS VACUUM LLC·Filed 2021·Granted Dec 31, 2024·0 cites·10 claims
- 2553US11421670B2Cryopump with enhanced frontal arrayEDWARDS VACUUM LLC·Filed 2018·Granted Aug 23, 2022·0 cites·17 claims
- 2652US2025033963A1Hydrogen recovery system and methodEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 2750US12106950B2Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pumpEDWARDS VACUUM LLC·Filed 2021·Granted Oct 1, 2024·0 cites·9 claims
- 2850US12049882B2Cryopanel structure for a cryopumpEDWARDS VACUUM LLC·Filed 2021·Granted Jul 30, 2024·0 cites·10 claims
- 2950US11705345B2Semiconductor system with steam generator and reactorEDWARDS VACUUM LLC·Filed 2020·Granted Jul 18, 2023·0 cites·15 claims
- 3049US2023392838A1Cryopumps and inlet flow restrictors for cryopumpsEDWARDS VACUUM LLC·Filed 2021·Application pending·0 cites
- 3149US2025043778A1CryopumpEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 3246US12146480B2CryopumpEDWARDS VACUUM LLC·Filed 2020·Granted Nov 19, 2024·0 cites·15 claims
- 3345US12014913B2Reducing plasma formation in an ion pumpEDWARDS VACUUM LLC·Filed 2020·Granted Jun 18, 2024·0 cites·12 claims
- 3445US2024401858A1Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration systemEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 3545US2023407858A1Monitoring the performance of a cryopumpEDWARDS VACUUM LLC·Filed 2021·Application pending·0 cites
- 3644US10845229B2Monitoring system and methodEDWARDS VACUUM LLC·Filed 2018·Granted Nov 24, 2020·0 cites·14 claims
- 3743US12282323B2Vacuum system with diagnostic circuitry and a method and computer program for monitoring the health of such a vacuum systemEDWARDS VACUUM LLC·Filed 2020·Granted Apr 22, 2025·0 cites·15 claims
- 3842US2022221197A1Very low temperature refrigeration system with fast operation cycleEDWARDS VACUUM LLC·Filed 2020·Application pending·0 cites
- 3941US2024226806A9Electrochemical hydrogen pumpEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 4039US12487133B2Detecting component temperature in a systemEDWARDS VACUUM LLC·Filed 2021·Granted Dec 2, 2025·0 cites·9 claims
- 4139USD944070SClampEDWARDS VACUUM LLC·Filed 2020·Granted Feb 22, 2022·1 cites·1 claims
- 4239US10121627B1Ion pump noble gas stability using small grain sized cathode materialEDWARDS VACUUM LLC·Filed 2017·Granted Nov 6, 2018·0 cites·18 claims
- 4339US2022238354A1Multiple vacuum chamber exhaust system and method of evacuating multiple chambersEDWARDS VACUUM LLC·Filed 2020·Application pending·0 cites
- 4438US12203486B2Mounting a flanged vacuum pump to a vacuum systemEDWARDS VACUUM LLC·Filed 2021·Granted Jan 21, 2025·0 cites·22 claims
- 4536US11415263B2Conversion kit for a support frame, a support frame and an integrated vacuum system mounted in a support frameEDWARDS VACUUM LLC·Filed 2020·Granted Aug 16, 2022·0 cites·19 claims
- 4635US10550829B2Ion trajectory manipulation architecture in an ion pumpEDWARDS VACUUM LLC·Filed 2016·Granted Feb 4, 2020·0 cites·15 claims
- 4735US2022204318A1Pump mounting frameEDWARDS VACUUM LLC·Filed 2020·Application pending·0 cites
- 4834US2023211991A1Transport device and method of moving vacuum system components in a confined spaceEDWARDS VACUUM LLC·Filed 2021·Application pending·0 cites
- 4933US2020018334A1Clamping apparatusEDWARDS VACUUM LLC·Filed 2018·Application pending·0 cites
- 5033US2024270013A1A mecanum wheel moduleEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
Showing the top 50 of 56 patent records by PatentIndex Score.
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