Assignee
EGASHIRA SHINICHI
JP·2 granted patents·2 citations·filing 2007–2007
Top patents by PatentIndex Score
2 records- 0161US8518614B2Mark position detection apparatusEGASHIRA SHINICHI·Filed 2007·Granted Aug 27, 2013·2 cites·11 claims
- 0239US8107051B2Exposure apparatus with improved alignment mark position measurement condition setting feature, and device manufacturing method using the sameEGASHIRA SHINICHI·Filed 2007·Granted Jan 31, 2012·0 cites·11 claims
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