Assignee
EHRICH PLASMA COATING
DE·2 granted patents·60 citations·filing 1990–1993
Top patents by PatentIndex Score
2 records- 0171US5096558AMethod and apparatus for evaporating material in vacuumEHRICH PLASMA COATING·Filed 1990·Granted Mar 17, 1992·35 cites·10 claims
- 0264US5662741AProcess for the ionization of thermally generated material vapors and a device for conducting the processEHRICH PLASMA COATING·Filed 1993·Granted Sep 2, 1997·25 cites·11 claims
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