Assignee
EISNER EDWARD C
US·3 granted patents·15 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0188US8637838B2System and method for ion implantation with improved productivity and uniformityEISNER EDWARD C·Filed 2011·Granted Jan 28, 2014·10 cites·20 claims
- 0275US8963107B2Beam line design to reduce energy contaminationEISNER EDWARD C·Filed 2012·Granted Feb 24, 2015·3 cites·18 claims
- 0371US8421039B2Method and apparatus for improved uniformity control with dynamic beam shapingEISNER EDWARD C·Filed 2011·Granted Apr 16, 2013·2 cites·11 claims
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