Assignee
ELECTRO SCIENT IND INC
US·265 granted patents·70 pending applications·9,072 citations·filing 1980–2025
Top patents by PatentIndex Score
335 records- 0199US7687740B2Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blowsELECTRO SCIENT IND INC·Filed 2005·Granted Mar 30, 2010·145 cites·32 claims
- 0299US6574250B2Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widthsELECTRO SCIENT IND INC·Filed 2001·Granted Jun 3, 2003·315 cites·60 claims
- 0399US5614114ALaser system and method for plating viasELECTRO SCIENT IND INC·Filed 1994·Granted Mar 25, 1997·183 cites·33 claims
- 0498US6706998B2Simulated laser spot enlargementELECTRO SCIENT IND INC·Filed 2003·Granted Mar 16, 2004·172 cites·22 claims
- 0598US6676878B2Laser segmented cuttingELECTRO SCIENT IND INC·Filed 2002·Granted Jan 13, 2004·267 cites·51 claims
- 0698US6174271B1High throughput hole forming system with multiple spindles per stationELECTRO SCIENT IND INC·Filed 1999·Granted Jan 16, 2001·130 cites·10 claims
- 0798US5751585AHigh speed, high accuracy multi-stage tool positioning systemELECTRO SCIENT IND INC·Filed 1996·Granted May 12, 1998·284 cites·22 claims
- 0898US5593606AUltraviolet laser system and method for forming vias in multi-layered targetsELECTRO SCIENT IND INC·Filed 1994·Granted Jan 14, 1997·419 cites·30 claims
- 0997US9227868B2Method and apparatus for machining strengthened glass and articles produced therebyELECTRO SCIENT IND INC·Filed 2013·Granted Jan 5, 2016·53 cites·23 claims
- 1097US8379678B2Method and apparatus for reliably laser marking articlesELECTRO SCIENT IND INC·Filed 2010·Granted Feb 19, 2013·30 cites·23 claims
- 1197US7019891B2AOM modulation techniques employing plurality of tilt-angled transducers to improve laser system performanceELECTRO SCIENT IND INC·Filed 2005·Granted Mar 28, 2006·44 cites·51 claims
- 1297US6887804B2Passivation processing over a memory linkELECTRO SCIENT IND INC·Filed 2003·Granted May 3, 2005·180 cites·79 claims
- 1397US6534743B2Resistor trimming with small uniform spot from solid-state UV laserELECTRO SCIENT IND INC·Filed 2002·Granted Mar 18, 2003·60 cites·50 claims
- 1497US6433301B1Beam shaping and projection imaging with solid state UV Gaussian beam to form viasELECTRO SCIENT IND INC·Filed 2000·Granted Aug 13, 2002·229 cites·46 claims
- 1596US8379679B2Method and apparatus for reliably laser marking articlesELECTRO SCIENT IND INC·Filed 2010·Granted Feb 19, 2013·36 cites·8 claims
- 1696US7425471B2Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offsetELECTRO SCIENT IND INC·Filed 2005·Granted Sep 16, 2008·49 cites·35 claims
- 1796US7133187B2AOM modulation techniques employing plurality of transducers to improve laser system performanceELECTRO SCIENT IND INC·Filed 2005·Granted Nov 7, 2006·41 cites·33 claims
- 1896US7133182B2AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systemsELECTRO SCIENT IND INC·Filed 2005·Granted Nov 7, 2006·26 cites·39 claims
- 1996US7027199B2AOM modulation techniques for facilitating pulse-to-pulse energy stability in laser systemsELECTRO SCIENT IND INC·Filed 2005·Granted Apr 11, 2006·38 cites·21 claims
- 2096US6706999B1Laser beam tertiary positioner apparatus and methodELECTRO SCIENT IND INC·Filed 2003·Granted Mar 16, 2004·108 cites·17 claims
- 2196US6593542B2UV laser system and method for single pulse severing of IC fusesELECTRO SCIENT IND INC·Filed 2001·Granted Jul 15, 2003·168 cites·98 claims
- 2296US6430465B2Abbe error correction system and methodELECTRO SCIENT IND INC·Filed 2001·Granted Aug 6, 2002·123 cites·56 claims
- 2396US6057180AMethod of severing electrically conductive links with ultraviolet laser outputELECTRO SCIENT IND INC·Filed 1998·Granted May 2, 2000·250 cites·45 claims
- 2496US5453594ARadiation beam position and emission coordination systemELECTRO SCIENT IND INC·Filed 1993·Granted Sep 26, 1995·132 cites·20 claims
- 2595US11077526B2Laser processing apparatus, methods of laser-processing workpieces and related arrangementsELECTRO SCIENT IND INC·Filed 2016·Granted Aug 3, 2021·9 cites·20 claims
- 2695US7133186B2AOM modulation techniques employing transducers to modulate different axesELECTRO SCIENT IND INC·Filed 2005·Granted Nov 7, 2006·25 cites·39 claims
- 2795US7133188B2AOM modulation techniques employing an upstream Bragg adjustment deviceELECTRO SCIENT IND INC·Filed 2005·Granted Nov 7, 2006·21 cites·29 claims
- 2895US6172325B1Laser processing power output stabilization apparatus and method employing processing position feedbackELECTRO SCIENT IND INC·Filed 1999·Granted Jan 9, 2001·178 cites·10 claims
- 2995US6100815ACompound switching matrix for probing and interconnecting devices under test to measurement equipmentELECTRO SCIENT IND INC·Filed 1997·Granted Aug 8, 2000·171 cites·11 claims
- 3095US5847960AMulti-tool positioning systemELECTRO SCIENT IND INC·Filed 1996·Granted Dec 8, 1998·193 cites·34 claims
- 3194US8761216B2Method and apparatus for reliably laser marking articlesELECTRO SCIENT IND INC·Filed 2013·Granted Jun 24, 2014·13 cites·51 claims
- 3294US7935941B2Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structuresELECTRO SCIENT IND INC·Filed 2005·Granted May 3, 2011·22 cites·39 claims
- 3394US7817685B2Methods and systems for generating pulse trains for material processingELECTRO SCIENT IND INC·Filed 2007·Granted Oct 19, 2010·22 cites·46 claims
- 3494US7776720B2Program-controlled dicing of a substrate using a pulsed laserELECTRO SCIENT IND INC·Filed 2003·Granted Aug 17, 2010·149 cites·49 claims
- 3594US7629234B2Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profilingELECTRO SCIENT IND INC·Filed 2005·Granted Dec 8, 2009·31 cites·27 claims
- 3694US6407363B2Laser system and method for single press micromachining of multilayer workpiecesELECTRO SCIENT IND INC·Filed 2001·Granted Jun 18, 2002·387 cites·90 claims
- 3794US5841099AMethod employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targetsELECTRO SCIENT IND INC·Filed 1996·Granted Nov 24, 1998·308 cites·43 claims
- 3893US9375946B2Method and apparatus for reliably laser marking articlesELECTRO SCIENT IND INC·Filed 2013·Granted Jun 28, 2016·6 cites·23 claims
- 3993US7638731B2Real time target topography tracking during laser processingELECTRO SCIENT IND INC·Filed 2005·Granted Dec 29, 2009·23 cites·25 claims
- 4093US7605343B2Micromachining with short-pulsed, solid-state UV laserELECTRO SCIENT IND INC·Filed 2006·Granted Oct 20, 2009·25 cites·32 claims
- 4193US6791060B2Beam shaping and projection imaging with solid state UV gaussian beam to form viasELECTRO SCIENT IND INC·Filed 2002·Granted Sep 14, 2004·83 cites·36 claims
- 4293US5057664AMethod and apparatus for laser processing a target material to provide a uniformly smooth, continuous trim profileELECTRO SCIENT IND INC·Filed 1989·Granted Oct 15, 1991·87 cites·20 claims
- 4392US7494900B2Back side wafer dicingELECTRO SCIENT IND INC·Filed 2006·Granted Feb 24, 2009·17 cites·31 claims
- 4492US7126746B2Generating sets of tailored laser pulsesELECTRO SCIENT IND INC·Filed 2004·Granted Oct 24, 2006·64 cites·56 claims
- 4592US6784399B2Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulsesELECTRO SCIENT IND INC·Filed 2002·Granted Aug 31, 2004·63 cites·110 claims
- 4692US5808272ALaser system for functional trimming of films and devicesELECTRO SCIENT IND INC·Filed 1997·Granted Sep 15, 1998·78 cites·12 claims
- 4792US5685995AMethod for laser functional trimming of films and devicesELECTRO SCIENT IND INC·Filed 1995·Granted Nov 11, 1997·78 cites·11 claims
- 4892US4337442AFirst laser pulse amplitude modulationELECTRO SCIENT IND INC·Filed 1980·Granted Jun 29, 1982·47 cites·7 claims
- 4991US9524856B2In-chamber fluid handling system and methods handling fluids using the sameELECTRO SCIENT IND INC·Filed 2014·Granted Dec 20, 2016·12 cites·29 claims
- 5091US7929857B2Optimizing use and performance of optical systems implemented with telecentric on-axis dark field illuminationELECTRO SCIENT IND INC·Filed 2009·Granted Apr 19, 2011·14 cites·3 claims
Showing the top 50 of 335 patent records by PatentIndex Score.
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