Assignee

ELECTRONICS PACKAGING SERVICES

US·1 granted patent·33 citations·filing 1998–1998

Technology mixG01B1 G01R1

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0159US5969819AMeasuring surface flatness using shadow moire technology and phase-stepping image processingELECTRONICS PACKAGING SERVICES·Filed 1998·Granted Oct 19, 1999·33 cites·18 claims

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