Assignee
EMD CORP
JP·2 granted patents·6 pending applications·0 citations·filing 2005–2021
Top patents by PatentIndex Score
8 records- 0155US12354839B2Radio-frequency antenna and plasma processing deviceEMD CORP·Filed 2021·Granted Jul 8, 2025·0 cites·17 claims
- 0255US11785701B2Plasma generatorEMD CORP·Filed 2021·Granted Oct 10, 2023·0 cites·8 claims
- 0354US2007193513A1Plasma generating method, plasma generating apparatus, and plasma processing apparatusEMD CORP·Filed 2007·Application pending·0 cites
- 0443US2013043128A1Sputtering systemEMD CORP·Filed 2011·Application pending·0 cites
- 0541US2021127476A1Plasma sourceEMD CORP·Filed 2020·Application pending·0 cites
- 0640US2007144672A1Plasma producing method and apparatus as well as plasma processing apparatusEMD CORP·Filed 2006·Application pending·0 cites
- 0732US2007293056A1Surface Modification Method for Solid Sample, Impurity Activation Method, and Method for Manufacturing Semiconductor DeviceEMD CORP·Filed 2005·Application pending·0 cites
- 0832US2019333735A1Plasma source and plasma processing apparatusEMD CORP·Filed 2017·Application pending·0 cites
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