Assignee

ENGINEERING RESEARCH CTR NORTH

US·1 granted patent·105 citations·filing 1992–1992

Technology mixH10D1 Y10S1

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1 record

0191US5406123ASingle crystal titanium nitride epitaxial on siliconENGINEERING RESEARCH CTR NORTH·Filed 1992·Granted Apr 11, 1995·105 cites·15 claims

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