Assignee
ENVIRONMENTAL METROLOGY CORP
US·4 granted patents·60 citations·filing 2005–2008
Top patents by PatentIndex Score
4 records- 0194US7332902B1Micro sensor for electrochemically monitoring residue in micro channelsENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Feb 19, 2008·40 cites·23 claims
- 0281US7489141B1Surface micro sensor and methodENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Feb 10, 2009·11 cites·18 claims
- 0376US7932726B1Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)ENVIRONMENTAL METROLOGY CORP·Filed 2008·Granted Apr 26, 2011·4 cites·18 claims
- 0466US7317317B1Shielded micro sensor and method for electrochemically monitoring residue in micro featuresENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Jan 8, 2008·5 cites·19 claims
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