Assignee
ENYA SYSTEMS LTD
JP·5 granted patents·193 citations·filing 1992–1994
Top patents by PatentIndex Score
5 records- 0186US5351360ACleaning device for a wafer mount plateENYA SYSTEMS LTD·Filed 1992·Granted Oct 4, 1994·122 cites·19 claims
- 0255US5720849AWafer mounting deviceENYA SYSTEMS LTD·Filed 1992·Granted Feb 24, 1998·18 cites·18 claims
- 0352US6063232AMethod and apparatus for etching an edge face of a waferENYA SYSTEMS LTD·Filed 1992·Granted May 16, 2000·31 cites·10 claims
- 0437US5602058AMethod and apparatus for applying a wafer to a mount plateENYA SYSTEMS LTD·Filed 1994·Granted Feb 11, 1997·14 cites·31 claims
- 0532US5248024AWafer mounting device having position indicatorENYA SYSTEMS LTD·Filed 1992·Granted Sep 28, 1993·8 cites·20 claims
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