Assignee
EQ TECH PLUS CO LTD
KR·1 granted patent·3 pending applications·0 citations·filing 2020–2025
Top patents by PatentIndex Score
4 records- 0152US2024177989A1Method of forming improved interfaces and thin film by using high-density radicalEQ TECH PLUS CO LTD·Filed 2024·Application pending·0 cites
- 0250US2024249935A1Method of forming thin film for minimizing increase in defects at interface during high-temperature oxidation processEQ TECH PLUS CO LTD·Filed 2023·Application pending·0 cites
- 0348US11661656B2Thin film forming apparatus and radical unit for forming thin filmEQ TECH PLUS CO LTD·Filed 2020·Granted May 30, 2023·0 cites·20 claims
- 0448US2025253146A1Thin film forming method employing interface-nitriding technique using high-density radicalsEQ TECH PLUS CO LTD·Filed 2025·Application pending·0 cites
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