Assignee
ESOL INC
KR·9 granted patents·5 pending applications·5 citations·filing 2022–2024
Top patents by PatentIndex Score
14 records- 0196US11561467B1Reflectivity and transmittance measuring device of EUV mask and EUV pellicleESOL INC·Filed 2022·Granted Jan 24, 2023·5 cites·7 claims
- 0266US11829064B2EUV lighting device using multilayer reflection zone plate and manufacturing method thereofESOL INC·Filed 2022·Granted Nov 28, 2023·0 cites·11 claims
- 0365US12332188B2High-performance EUV microscope with free form illumination systemESOL INC·Filed 2023·Granted Jun 17, 2025·0 cites·10 claims
- 0465US11740552B2Pellicle structure for EUV lithography and manufacturing method thereforESOL INC·Filed 2022·Granted Aug 29, 2023·0 cites·7 claims
- 0564US12282144B2High-performance EUV microscope device with free-form illumination system structureESOL INC·Filed 2023·Granted Apr 22, 2025·0 cites·12 claims
- 0662US11898970B2EUV mask inspection device using multilayer reflection zone plateESOL INC·Filed 2022·Granted Feb 13, 2024·0 cites·9 claims
- 0761US2026036909A1Synchrotron light sourceESOL INC·Filed 2024·Application pending·0 cites
- 0860US12287579B2High-performance EUV microscope device with free-form illumination system structure having elliptical mirrorESOL INC·Filed 2022·Granted Apr 29, 2025·0 cites·8 claims
- 0956US11817230B1Device for EUV light sourceESOL INC·Filed 2022·Granted Nov 14, 2023·0 cites·5 claims
- 1056US2025234446A1Rotational disk structure for euv light source deviceESOL INC·Filed 2024·Application pending·0 cites
- 1156US2025234448A1On-axis type euv light source device with target material supply channelESOL INC·Filed 2024·Application pending·0 cites
- 1256US2025234447A1Shield-integrated rotational disk euv light source device including fragment shieldESOL INC·Filed 2024·Application pending·0 cites
- 1355US2026064007A1Euv light source device for euv mask inspectionESOL INC·Filed 2024·Application pending·0 cites
- 1448US12250763B2EUV light source device and plasma gas recycling system for high-density plasma generationESOL INC·Filed 2022·Granted Mar 11, 2025·0 cites·5 claims
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