Assignee

ESSOX RES AND DEV INC

US·1 granted patent·12 citations·filing 2000–2000

Technology mixG21B1 Y02E1

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1 record

0160US6752972B1Plasma processing method and apparatusESSOX RES AND DEV INC·Filed 2000·Granted Jun 22, 2004·12 cites·69 claims

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