Assignee
ETAMAX CO LTD
KR·4 granted patents·1 pending application·1 citations·filing 2013–2022
Top patents by PatentIndex Score
5 records- 0172US11605560B2Die division method and inspection apparatus for avoiding defects locations on silicon carbide wafersETAMAX CO LTD·Filed 2021·Granted Mar 14, 2023·1 cites·6 claims
- 0262US2023109887A1Defect classification equipment for silicon carbide substrate using single incident light-based photoluminescence and defect classification method using the sameETAMAX CO LTD·Filed 2022·Application pending·0 cites
- 0358US12372469B2Defect classification equipment for silicon carbide substrate using single incident light-based photoluminescence and defect classification method using the sameETAMAX CO LTD·Filed 2022·Granted Jul 29, 2025·0 cites·9 claims
- 0434US11009461B2Defect investigation device simultaneously detecting photoluminescence and scattered lightETAMAX CO LTD·Filed 2017·Granted May 18, 2021·0 cites·20 claims
- 0533US9945898B2Method and device for measuring internal quantum efficiency of an optical elementETAMAX CO LTD·Filed 2013·Granted Apr 17, 2018·0 cites·8 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →