Assignee
ETEC SYSTEMS INC
US·61 granted patents·2,019 citations·filing 1989–2000
Top patents by PatentIndex Score
61 records- 0195US5103101AMultiphase printing for E-beam lithographyETEC SYSTEMS INC·Filed 1991·Granted Apr 7, 1992·154 cites·17 claims
- 0294US5847959AMethod and apparatus for run-time correction of proximity effects in pattern generationETEC SYSTEMS INC·Filed 1997·Granted Dec 8, 1998·177 cites·20 claims
- 0394US5227839ASmall field scannerETEC SYSTEMS INC·Filed 1991·Granted Jul 13, 1993·91 cites·15 claims
- 0491US6200736B1Photoresist developer and methodETEC SYSTEMS INC·Filed 2000·Granted Mar 13, 2001·56 cites·13 claims
- 0591US5393987ADose modulation and pixel deflection for raster scan lithographyETEC SYSTEMS INC·Filed 1993·Granted Feb 28, 1995·96 cites·33 claims
- 0689US5533170ARasterizer for a pattern generation apparatusETEC SYSTEMS INC·Filed 1994·Granted Jul 2, 1996·125 cites·13 claims
- 0789US5386221ALaser pattern generation apparatusETEC SYSTEMS INC·Filed 1992·Granted Jan 31, 1995·88 cites·28 claims
- 0888US6281508B1Precision alignment and assembly of microlenses and microcolumnsETEC SYSTEMS INC·Filed 1999·Granted Aug 28, 2001·53 cites·28 claims
- 0988US6023060AT-shaped electron-beam microcolumn as a general purpose scanning electron microscopeETEC SYSTEMS INC·Filed 1998·Granted Feb 8, 2000·58 cites·20 claims
- 1088US5876902ARaster shaped beam writing strategy system and method for pattern generationETEC SYSTEMS INC·Filed 1997·Granted Mar 2, 1999·72 cites·7 claims
- 1186US6220914B1Method of forming gated photocathode for controlled single and multiple electron beam emissionETEC SYSTEMS INC·Filed 1999·Granted Apr 24, 2001·42 cites·18 claims
- 1285US6274290B1Raster scan gaussian beam writing strategy and method for pattern generationETEC SYSTEMS INC·Filed 1998·Granted Aug 14, 2001·43 cites·9 claims
- 1385US5255051ASmall field scannerETEC SYSTEMS INC·Filed 1993·Granted Oct 19, 1993·40 cites·3 claims
- 1482US6037967AShort wavelength pulsed laser scannerETEC SYSTEMS INC·Filed 1996·Granted Mar 14, 2000·71 cites·28 claims
- 1582US5784925AVacuum compatible linear motion deviceETEC SYSTEMS INC·Filed 1996·Granted Jul 28, 1998·35 cites·42 claims
- 1681US5246800ADiscrete phase shift mask writingETEC SYSTEMS INC·Filed 1991·Granted Sep 21, 1993·43 cites·14 claims
- 1780US6297584B1Precision alignment of microcolumn tip to a micron-size extractor apertureETEC SYSTEMS INC·Filed 2000·Granted Oct 2, 2001·14 cites·5 claims
- 1879US6195214B1Microcolumn assembly using laser spot weldingETEC SYSTEMS INC·Filed 1999·Granted Feb 27, 2001·32 cites·24 claims
- 1977US6262429B1Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash fieldETEC SYSTEMS INC·Filed 1999·Granted Jul 17, 2001·35 cites·30 claims
- 2076US6300630B1Annular differential seal for electron beam apparatus using isolation valve and additional differential pumpingETEC SYSTEMS INC·Filed 1999·Granted Oct 9, 2001·28 cites·13 claims
- 2176US6259106B1Apparatus and method for controlling a beam shapeETEC SYSTEMS INC·Filed 1999·Granted Jul 10, 2001·40 cites·10 claims
- 2276US5757469AScanning lithography system haing double pass Wynne-Dyson opticsETEC SYSTEMS INC·Filed 1995·Granted May 26, 1998·42 cites·30 claims
- 2375US6288401B1Electrostatic alignment of a charged particle beamETEC SYSTEMS INC·Filed 1999·Granted Sep 11, 2001·26 cites·20 claims
- 2475US6215128B1Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Apr 10, 2001·34 cites·22 claims
- 2574US6157039ACharged particle beam illumination of blanking aperture arrayETEC SYSTEMS INC·Filed 1998·Granted Dec 5, 2000·25 cites·32 claims
- 2674US5729022AComposite concentric-gap magnetic lens and deflector with conical pole piecesETEC SYSTEMS INC·Filed 1996·Granted Mar 17, 1998·23 cites·16 claims
- 2774US5304888AMechanically stable field emission gunETEC SYSTEMS INC·Filed 1992·Granted Apr 19, 1994·29 cites·7 claims
- 2873US5177402AArc suppressor for electron gunETEC SYSTEMS INC·Filed 1992·Granted Jan 5, 1993·26 cites·8 claims
- 2972US6084706AHigh efficiency laser pattern generatorETEC SYSTEMS INC·Filed 1998·Granted Jul 4, 2000·32 cites·16 claims
- 3071US5327338AScanning laser lithography system alignment apparatusETEC SYSTEMS INC·Filed 1992·Granted Jul 5, 1994·29 cites·26 claims
- 3169US5012104AThermally stable magnetic deflection assembly and method of making sameETEC SYSTEMS INC·Filed 1990·Granted Apr 30, 1991·21 cites·11 claims
- 3265US5900667AOperating a solid state particle detector within a magnetic deflection field so as to minimize eddy currentsETEC SYSTEMS INC·Filed 1996·Granted May 4, 1999·17 cites·8 claims
- 3365US5739964AMagnification correction for small field scanningETEC SYSTEMS INC·Filed 1995·Granted Apr 14, 1998·21 cites·25 claims
- 3464US6011269AShaped shadow projection for an electron beam columnETEC SYSTEMS INC·Filed 1998·Granted Jan 4, 2000·16 cites·15 claims
- 3563US5838006AConical baffle for reducing charging drift in a particle beam systemETEC SYSTEMS INC·Filed 1996·Granted Nov 17, 1998·16 cites·18 claims
- 3661US5196707ALow aberration field emission electron gunETEC SYSTEMS INC·Filed 1991·Granted Mar 23, 1993·16 cites·8 claims
- 3760US6002135AMagnetic lens and deflector with inner and outer pole pieces with conical inner pole pieceETEC SYSTEMS INC·Filed 1998·Granted Dec 14, 1999·12 cites·19 claims
- 3859US5136166ATemperature stable magnetic deflection assemblyETEC SYSTEMS INC·Filed 1991·Granted Aug 4, 1992·13 cites·10 claims
- 3958US6057921ATwo piece mirror arrangement for interferometrically controlled stageETEC SYSTEMS INC·Filed 1998·Granted May 2, 2000·20 cites·7 claims
- 4055US6326635B1Minimization of electron fogging in electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Dec 4, 2001·12 cites·14 claims
- 4155US5959606ARasterizer for pattern generatorETEC SYSTEMS INC·Filed 1994·Granted Sep 28, 1999·11 cites·14 claims
- 4254US6279490B1Epicyclic stageETEC SYSTEMS INC·Filed 1999·Granted Aug 28, 2001·20 cites·29 claims
- 4353US6271514B1Multi-beam scanner including a dove prism arrayETEC SYSTEMS INC·Filed 1999·Granted Aug 7, 2001·16 cites·21 claims
- 4453US5276330AHigh accuracy beam blankerETEC SYSTEMS INC·Filed 1991·Granted Jan 4, 1994·11 cites·6 claims
- 4552US6295157B1Thermally balanced acousto-optic modulatorETEC SYSTEMS INC·Filed 1999·Granted Sep 25, 2001·19 cites·12 claims
- 4652US6008060ADetecting registration marks with a low energy electron beamETEC SYSTEMS INC·Filed 1998·Granted Dec 28, 1999·18 cites·13 claims
- 4752US5345085AMethod and structure for electronically measuring beam parametersETEC SYSTEMS INC·Filed 1993·Granted Sep 6, 1994·27 cites·38 claims
- 4844US6219146B1Laser reflector alignmentETEC SYSTEMS INC·Filed 1999·Granted Apr 17, 2001·11 cites·29 claims
- 4943US6331711B1Correction for systematic, low spatial frequency critical dimension variations in lithographyETEC SYSTEMS INC·Filed 1999·Granted Dec 18, 2001·13 cites·11 claims
- 5043US5815245AScanning lithography system with opposing motionETEC SYSTEMS INC·Filed 1995·Granted Sep 29, 1998·8 cites·23 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
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