Assignee

EUV L L C

US·2 granted patents·131 citations·filing 1998–1999

Technology mixG03F2 H02N1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0190US6118577ADiffractive element in extreme-UV lithography condenserEUV L L C·Filed 1998·Granted Sep 12, 2000·81 cites·26 claims
0277US6169652B1Electrostatically screened, voltage-controlled electrostatic chuckEUV L L C·Filed 1999·Granted Jan 2, 2001·50 cites·24 claims

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