Assignee
EUV TECH INC
US·2 granted patents·2 pending applications·2 citations·filing 2021–2024
Top patents by PatentIndex Score
4 records- 0182US11960202B1EUV mask defect tool apparatusEUV TECH INC·Filed 2021·Granted Apr 16, 2024·2 cites·10 claims
- 0271US2025116615A1EUV MicroscopeEUV TECH INC·Filed 2024·Application pending·0 cites
- 0365US12203874B2EUV microscopeEUV TECH INC·Filed 2022·Granted Jan 21, 2025·0 cites·17 claims
- 0455US2026051711A1Systems, Methods, And Devices For Gas Pressure Profile ControlEUV TECH INC·Filed 2024·Application pending·0 cites
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