Assignee
EXCIMER LASER SYSTEMS INC
US·3 granted patents·309 citations·filing 1994–1996
Top patents by PatentIndex Score
3 records- 0195US5559338ADeep ultraviolet optical imaging system for microlithography and/or microfabricationEXCIMER LASER SYSTEMS INC·Filed 1994·Granted Sep 24, 1996·141 cites·19 claims
- 0295US5488229ADeep ultraviolet microlithography systemEXCIMER LASER SYSTEMS INC·Filed 1994·Granted Jan 30, 1996·122 cites·19 claims
- 0370US5771260AEnclosure system for laser optical systems and devicesEXCIMER LASER SYSTEMS INC·Filed 1996·Granted Jun 23, 1998·46 cites·34 claims
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