Assignee
FAB SOLUTIONS INC
JP·24 granted patents·492 citations·filing 1999–2005
Top patents by PatentIndex Score
24 records- 0197US6768324B1Semiconductor device tester which measures information related to a structure of a sample in a depth directionFAB SOLUTIONS INC·Filed 2000·Granted Jul 27, 2004·141 cites·35 claims
- 0291US6559662B1Semiconductor device tester and semiconductor device test methodFAB SOLUTIONS INC·Filed 2000·Granted May 6, 2003·59 cites·31 claims
- 0387US6683308B2Method and apparatus for measuring thickness of thin filmFAB SOLUTIONS INC·Filed 2003·Granted Jan 27, 2004·51 cites·18 claims
- 0486US6946857B2Semiconductor device testerFAB SOLUTIONS INC·Filed 2004·Granted Sep 20, 2005·25 cites·25 claims
- 0586US6614244B2Semiconductor device inspecting apparatusFAB SOLUTIONS INC·Filed 2001·Granted Sep 2, 2003·35 cites·13 claims
- 0684US6809534B2Semiconductor device test method and semiconductor device testerFAB SOLUTIONS INC·Filed 2001·Granted Oct 26, 2004·19 cites·37 claims
- 0783US6850079B2Film thickness measuring apparatus and a method for measuring a thickness of a filmFAB SOLUTIONS INC·Filed 2003·Granted Feb 1, 2005·16 cites·32 claims
- 0882US6975125B2Semiconductor device testerFAB SOLUTIONS INC·Filed 2004·Granted Dec 13, 2005·19 cites·42 claims
- 0979US7232994B2Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a waferFAB SOLUTIONS INC·Filed 2005·Granted Jun 19, 2007·3 cites·20 claims
- 1076US7321805B2Production managing system of semiconductor deviceFAB SOLUTIONS INC·Filed 2004·Granted Jan 22, 2008·14 cites·38 claims
- 1176US6614050B1Semiconductor manufacturing apparatusFAB SOLUTIONS INC·Filed 2000·Granted Sep 2, 2003·28 cites·10 claims
- 1275US6897440B1Contact hole standard test deviceFAB SOLUTIONS INC·Filed 1999·Granted May 24, 2005·27 cites·27 claims
- 1370US6940296B2Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a waferFAB SOLUTIONS INC·Filed 2004·Granted Sep 6, 2005·8 cites·36 claims
- 1469US6711453B2Production managing system of semiconductor deviceFAB SOLUTIONS INC·Filed 2002·Granted Mar 23, 2004·10 cites·17 claims
- 1568US6967327B2Contact hole standard test device, method of forming the same, method testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a waferFAB SOLUTIONS INC·Filed 2004·Granted Nov 22, 2005·4 cites·37 claims
- 1668US6943043B2Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor deviceFAB SOLUTIONS INC·Filed 2004·Granted Sep 13, 2005·8 cites·21 claims
- 1766US6982418B2Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a waferFAB SOLUTIONS INC·Filed 2004·Granted Jan 3, 2006·3 cites·32 claims
- 1863US7049834B2Semiconductor device test method and semiconductor device testerFAB SOLUTIONS INC·Filed 2005·Granted May 23, 2006·2 cites·20 claims
- 1960US6842663B2Production managing system of semiconductor deviceFAB SOLUTIONS INC·Filed 2004·Granted Jan 11, 2005·5 cites·11 claims
- 2059US6753194B2Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor deviceFAB SOLUTIONS INC·Filed 2002·Granted Jun 22, 2004·5 cites·6 claims
- 2154US6914444B2Semiconductor device test method and semiconductor device testerFAB SOLUTIONS INC·Filed 2004·Granted Jul 5, 2005·3 cites·23 claims
- 2254US6900645B2Semiconductor device test method and semiconductor device testerFAB SOLUTIONS INC·Filed 2004·Granted May 31, 2005·3 cites·21 claims
- 2350US6837936B2Semiconductor manufacturing deviceFAB SOLUTIONS INC·Filed 2002·Granted Jan 4, 2005·2 cites·28 claims
- 2445US7002361B2Film thickness measuring apparatus and a method for measuring a thickness of a filmFAB SOLUTIONS INC·Filed 2004·Granted Feb 21, 2006·2 cites·22 claims
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