Assignee
FABMATICS GMBH
DE·2 granted patents·1 pending application·4 citations·filing 2017–2024
Top patents by PatentIndex Score
3 records- 0169US10847396B2FOUP measurement chamberFABMATICS GMBH·Filed 2017·Granted Nov 24, 2020·4 cites·11 claims
- 0257US2024327119A1Shuttle storage and method for producing the sameFABMATICS GMBH·Filed 2024·Application pending·0 cites
- 0340US11462427B2Interface device for a purging unit for purging a wafer containerFABMATICS GMBH·Filed 2019·Granted Oct 4, 2022·0 cites·9 claims
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