Assignee
FEI CO
US·661 granted patents·233 pending applications·5,279 citations·filing 1991–2025
Top patents by PatentIndex Score
894 records- 0198US6457350B1Carbon nanotube probe tip grown on a small probeFEI CO·Filed 2000·Granted Oct 1, 2002·95 cites·28 claims
- 0297US11955310B2Transmission charged particle microscope with an electron energy loss spectroscopy detectorFEI CO·Filed 2021·Granted Apr 9, 2024·3 cites·10 claims
- 0397US7670455B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2007·Granted Mar 2, 2010·48 cites·30 claims
- 0496US11460419B2Electron diffraction holographyFEI CO·Filed 2020·Granted Oct 4, 2022·4 cites·20 claims
- 0596US11183364B1Dual beam microscope system for imaging during sample processingFEI CO·Filed 2020·Granted Nov 23, 2021·7 cites·19 claims
- 0696US7767979B2Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holderFEI CO·Filed 2007·Granted Aug 3, 2010·26 cites·7 claims
- 0796US7348556B2Method of measuring three-dimensional surface roughness of a structureFEI CO·Filed 2005·Granted Mar 25, 2008·59 cites·24 claims
- 0896US7241361B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2004·Granted Jul 10, 2007·86 cites·20 claims
- 0996US6889113B2Graphical automated machine control and metrologyFEI CO·Filed 2002·Granted May 3, 2005·85 cites·34 claims
- 1096US5435850AGas injection systemFEI CO·Filed 1993·Granted Jul 25, 1995·164 cites·28 claims
- 1195US11906450B2Electron diffraction holographyFEI CO·Filed 2022·Granted Feb 20, 2024·2 cites·20 claims
- 1295US9818584B2Internal split faraday shield for a plasma sourceFEI CO·Filed 2014·Granted Nov 14, 2017·21 cites·17 claims
- 1395US7317515B2Method of localizing fluorescent markersFEI CO·Filed 2005·Granted Jan 8, 2008·29 cites·20 claims
- 1495US6900447B2Focused ion beam system with coaxial scanning electron microscopeFEI CO·Filed 2003·Granted May 31, 2005·77 cites·36 claims
- 1595US6211527B1Method for device editingFEI CO·Filed 1999·Granted Apr 3, 2001·143 cites·22 claims
- 1694US11127562B1System and method for RF pulsed electron beam based STEMFEI CO·Filed 2020·Granted Sep 21, 2021·3 cites·20 claims
- 1794US10224174B1Transmission charged particle microscope with imaging beam rotationFEI CO·Filed 2017·Granted Mar 5, 2019·18 cites·10 claims
- 1894US9934930B2High aspect ratio x-ray targets and uses of sameFEI CO·Filed 2015·Granted Apr 3, 2018·19 cites·11 claims
- 1994US8937282B2Mineral identification using mineral definitions including variabilityFEI CO·Filed 2012·Granted Jan 20, 2015·25 cites·3 claims
- 2094US8912490B2Method for preparing samples for imagingFEI CO·Filed 2013·Granted Dec 16, 2014·20 cites·9 claims
- 2194US7408178B2Method for the removal of a microscopic sample from a substrateFEI CO·Filed 2005·Granted Aug 5, 2008·26 cites·16 claims
- 2294US7308334B2Graphical automated machine control and metrologyFEI CO·Filed 2005·Granted Dec 11, 2007·27 cites·9 claims
- 2394US7064325B2Apparatus with permanent magnetic lensesFEI CO·Filed 2005·Granted Jun 20, 2006·20 cites·24 claims
- 2494US6963068B2Method for the manufacture and transmissive irradiation of a sample, and particle-optical systemFEI CO·Filed 2004·Granted Nov 8, 2005·72 cites·40 claims
- 2594US6753538B2Electron beam processingFEI CO·Filed 2002·Granted Jun 22, 2004·179 cites·49 claims
- 2694US6579665B2Thin-film magnetic recording head manufactureFEI CO·Filed 2002·Granted Jun 17, 2003·50 cites·6 claims
- 2793US11756762B2Rotating sample holder for random angle sampling in tomographyFEI CO·Filed 2022·Granted Sep 12, 2023·2 cites·15 claims
- 2893US11217425B2System and method for preparation and delivery of biological samples for charged particle analysisFEI CO·Filed 2020·Granted Jan 4, 2022·4 cites·26 claims
- 2993US10446366B1Imaging technique in scanning transmission charged particle microscopyFEI CO·Filed 2018·Granted Oct 15, 2019·13 cites·20 claims
- 3093US9620330B2Mathematical image assembly in a scanning-type microscopeFEI CO·Filed 2015·Granted Apr 11, 2017·15 cites·20 claims
- 3193US9601313B2Automated TEM sample preparationFEI CO·Filed 2015·Granted Mar 21, 2017·14 cites·20 claims
- 3293US9401262B2Multi-source plasma focused ion beam systemFEI CO·Filed 2015·Granted Jul 26, 2016·4 cites·19 claims
- 3393US9312098B2Method of examining a sample in a charged-particle microscopeFEI CO·Filed 2015·Granted Apr 12, 2016·16 cites·20 claims
- 3493US9064811B2Precursor for planar deprocessing of semiconductor devices using a focused ion beamFEI CO·Filed 2013·Granted Jun 23, 2015·12 cites·8 claims
- 3593US8890064B2Method for S/TEM sample analysisFEI CO·Filed 2013·Granted Nov 18, 2014·12 cites·8 claims
- 3693US8772716B2Phase plate for a TEMFEI CO·Filed 2013·Granted Jul 8, 2014·12 cites·11 claims
- 3793US8729469B1Multiple sample attachment to nano manipulator for high throughput sample preparationFEI CO·Filed 2013·Granted May 20, 2014·18 cites·17 claims
- 3893US7915584B2TEM with aberration corrector and phase plateFEI CO·Filed 2009·Granted Mar 29, 2011·19 cites·26 claims
- 3993US6268608B1Method and apparatus for selective in-situ etching of inter dielectric layersFEI CO·Filed 1998·Granted Jul 31, 2001·122 cites·37 claims
- 4092US12175648B2Method implemented by a data processing apparatus, and charged particle beam device for inspecting a specimen using such a methodFEI CO·Filed 2023·Granted Dec 24, 2024·2 cites·22 claims
- 4192US12061159B2Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused ion beamsFEI CO·Filed 2022·Granted Aug 13, 2024·2 cites·28 claims
- 4292US11651928B2Reentrant gas system for charged particle microscopeFEI CO·Filed 2021·Granted May 16, 2023·2 cites·20 claims
- 4392US11513079B2Method and system for wafer defect inspectionFEI CO·Filed 2020·Granted Nov 29, 2022·4 cites·19 claims
- 4492US10928335B2Adaptive specimen image acquisition using an artificial neural networkFEI CO·Filed 2019·Granted Feb 23, 2021·4 cites·20 claims
- 4592US9040909B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2012·Granted May 26, 2015·10 cites·19 claims
- 4692US8822921B2Method for preparing samples for imagingFEI CO·Filed 2013·Granted Sep 2, 2014·11 cites·15 claims
- 4792US8011259B2Sample carrier comprising a deformable strip of material folded back upon itself and sample holderFEI CO·Filed 2010·Granted Sep 6, 2011·11 cites·18 claims
- 4892US7906762B2Compact scanning electron microscopeFEI CO·Filed 2007·Granted Mar 15, 2011·25 cites·16 claims
- 4992US7544523B2Method of fabricating nanodevicesFEI CO·Filed 2006·Granted Jun 9, 2009·19 cites·35 claims
- 5092US7442924B2Repetitive circumferential milling for sample preparationFEI CO·Filed 2006·Granted Oct 28, 2008·41 cites·31 claims
Showing the top 50 of 894 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →