Assignee

FELDBAUM MICHAEL R

US·2 granted patents·3 citations·filing 2011–2011

Technology mixB82Y1 C23F1 G03F1 G11B1 H01J1 Y10T1

Top patents by PatentIndex Score

2 records

0172US9330885B2Method of stack patterning using a ion etchingFELDBAUM MICHAEL R·Filed 2011·Granted May 3, 2016·3 cites·21 claims
0251US9284649B2Method of patterning a stackFELDBAUM MICHAEL R·Filed 2011·Granted Mar 15, 2016·0 cites·24 claims

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