Assignee
FELDMANN HEIKO
DE·5 granted patents·1 pending application·8 citations·filing 2008–2012
Top patents by PatentIndex Score
6 records- 0186US8310752B2Method of manufacturing a projection objective and projection objectiveFELDMANN HEIKO·Filed 2009·Granted Nov 13, 2012·7 cites·5 claims
- 0262US10114293B2Illumination system and projection objective of a mask inspection apparatusFELDMANN HEIKO·Filed 2012·Granted Oct 30, 2018·1 cites·45 claims
- 0352US9360775B2Method of manufacturing a projection objective and projection objectiveFELDMANN HEIKO·Filed 2012·Granted Jun 7, 2016·0 cites·25 claims
- 0451US8211627B2Method and apparatus for structuring a radiation-sensitive materialFELDMANN HEIKO·Filed 2008·Granted Jul 3, 2012·0 cites·27 claims
- 0550US8068276B2Projection objective for lithographyFELDMANN HEIKO·Filed 2010·Granted Nov 29, 2011·0 cites·20 claims
- 0642US2013335552A1Method for mask inspection, and mask inspection installationFELDMANN HEIKO·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →