Assignee
FEMTOMETRIX INC
US·15 granted patents·12 pending applications·129 citations·filing 2015–2025
Top patents by PatentIndex Score
27 records- 0198US12241924B2Wafer metrology technologiesFEMTOMETRIX INC·Filed 2022·Granted Mar 4, 2025·3 cites·19 claims
- 0298US11821911B2Pump and probe type second harmonic generation metrologyFEMTOMETRIX INC·Filed 2021·Granted Nov 21, 2023·6 cites·6 claims
- 0398US11293965B2Wafer metrology technologiesFEMTOMETRIX INC·Filed 2020·Granted Apr 5, 2022·12 cites·14 claims
- 0498US11150287B2Pump and probe type second harmonic generation metrologyFEMTOMETRIX INC·Filed 2020·Granted Oct 19, 2021·9 cites·16 claims
- 0598US10663504B2Field-biased second harmonic generation metrologyFEMTOMETRIX INC·Filed 2017·Granted May 26, 2020·14 cites·23 claims
- 0697US11988611B2Systems for parsing material properties from within SHG signalsFEMTOMETRIX INC·Filed 2021·Granted May 21, 2024·4 cites·18 claims
- 0797US10613131B2Pump and probe type second harmonic generation metrologyFEMTOMETRIX INC·Filed 2018·Granted Apr 7, 2020·15 cites·22 claims
- 0897US10591525B2Wafer metrology technologiesFEMTOMETRIX INC·Filed 2017·Granted Mar 17, 2020·15 cites·32 claims
- 0996US11415617B2Field-biased second harmonic generation metrologyFEMTOMETRIX INC·Filed 2019·Granted Aug 16, 2022·9 cites·12 claims
- 1096US11199507B2Systems for parsing material properties from within SHG signalsFEMTOMETRIX INC·Filed 2019·Granted Dec 14, 2021·11 cites·9 claims
- 1196US10551325B2Systems for parsing material properties from within SHG signalsFEMTOMETRIX INC·Filed 2015·Granted Feb 4, 2020·19 cites·8 claims
- 1294US11946863B2Second Harmonic Generation (SHG) optical inspection system designsFEMTOMETRIX INC·Filed 2019·Granted Apr 2, 2024·7 cites·11 claims
- 1390US12553708B2Second-harmonic generation for critical dimensional metrologyFEMTOMETRIX INC·Filed 2022·Granted Feb 17, 2026·1 cites·11 claims
- 1487US12158492B2Systems and methods for determining characteristics of semiconductor devicesFEMTOMETRIX INC·Filed 2019·Granted Dec 3, 2024·4 cites·12 claims
- 1582US2025093277A1Systems for parsing material properties from within shg signalsFEMTOMETRIX INC·Filed 2024·Application pending·0 cites
- 1679US2025155486A1Wafer metrology technologiesFEMTOMETRIX INC·Filed 2025·Application pending·0 cites
- 1766US2018292441A1Charge decay measurement systems and methodsFEMTOMETRIX INC·Filed 2018·Application pending·0 cites
- 1861US12562333B2Method and apparatus for non-invasive, non-intrusive, and un-grounded, simultaneous corona deposition and SHG measurementsFEMTOMETRIX INC·Filed 2023·Granted Feb 24, 2026·0 cites·13 claims
- 1960US2015331036A1Field-biased second harmonic generation metrologyFEMTOMETRIX INC·Filed 2015·Application pending·0 cites
- 2060US2015330908A1Pump and probe type second harmonic generation metrologyFEMTOMETRIX INC·Filed 2015·Application pending·0 cites
- 2160US2015330909A1Wafer metrology techonologiesFEMTOMETRIX INC·Filed 2015·Application pending·0 cites
- 2260US2015331029A1Charge decay measurement systems and methodsFEMTOMETRIX INC·Filed 2015·Application pending·0 cites
- 2358US2025224327A1Nonlinear optical stokes ellipsometersFEMTOMETRIX INC·Filed 2024·Application pending·0 cites
- 2458US2024077302A1Dimensional metrology using non-linear opticsFEMTOMETRIX INC·Filed 2023·Application pending·0 cites
- 2556US2024085345A1Method and apparatus for separation of the second harmonic generation components, through variation in the input probing laser polarizationFEMTOMETRIX INC·Filed 2023·Application pending·0 cites
- 2648US2024094278A1Apparatus and method of increasing precision control of charge deposition onto a semiconductor wafer substrateFEMTOMETRIX INC·Filed 2023·Application pending·0 cites
- 2746US2024085324A1Method and apparatus for main detector synchronization of optically based second harmonic generation measurementsFEMTOMETRIX INC·Filed 2023·Application pending·0 cites
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