Assignee
FILPLAS VACUUM TECHNOLOGY PTE
SG·8 granted patents·1 pending application·188 citations·filing 1996–2003
Top patents by PatentIndex Score
9 records- 0186US6319369B1Ignition means for a cathodic arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 1999·Granted Nov 20, 2001·44 cites·9 claims
- 0280US7014738B2Enhanced macroparticle filter and cathode arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 2003·Granted Mar 21, 2006·16 cites·31 claims
- 0379US6511585B1Enhanced macroparticle filter and cathode arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jan 28, 2003·33 cites·7 claims
- 0478US6413387B1Cathode arc source for metallic and dielectric coatingsFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jul 2, 2002·47 cites·17 claims
- 0567US6736949B2Filtered cathode arc source deposition apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 2001·Granted May 18, 2004·7 cites·19 claims
- 0665US6262539B1Cathode arc source with target feeding apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jul 17, 2001·18 cites·28 claims
- 0759US6761805B1Cathode arc source with magnetic field generating means positioned above and below the cathodeFILPLAS VACUUM TECHNOLOGY PTE·Filed 1999·Granted Jul 13, 2004·14 cites·19 claims
- 0846US6338779B1Arc monitoringFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jan 15, 2002·9 cites·13 claims
- 0929US2001002002A1Deposition apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 1996·Application pending·0 cites
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