Assignee
FINK STEVEN T
US·2 granted patents·3 pending applications·46 citations·filing 2005–2011
Top patents by PatentIndex Score
5 records- 0196US8927907B2Thermally zoned substrate holder assemblyFINK STEVEN T·Filed 2011·Granted Jan 6, 2015·35 cites·11 claims
- 0288US8092602B2Thermally zoned substrate holder assemblyFINK STEVEN T·Filed 2007·Granted Jan 10, 2012·11 cites·24 claims
- 0345US2007170155A1Method and apparatus for modifying an etch profileFINK STEVEN T·Filed 2006·Application pending·0 cites
- 0440US2006225654A1Disposable plasma reactor materials and methodsFINK STEVEN T·Filed 2005·Application pending·0 cites
- 0540US2006213617A1Load bearing insulator in vacuum etch chambersFINK STEVEN T·Filed 2005·Application pending·0 cites
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