Assignee
FISH ROGER B
US·4 granted patents·2 pending applications·9 citations·filing 2008–2012
Top patents by PatentIndex Score
6 records- 0173US8328494B2In vacuum optical wafer heater for cryogenic processingFISH ROGER B·Filed 2009·Granted Dec 11, 2012·4 cites·19 claims
- 0268US9163772B2Vacuum insulated cryogenic fluid transfer hoseFISH ROGER B·Filed 2012·Granted Oct 20, 2015·3 cites·11 claims
- 0364US8149256B2Techniques for changing temperature of a platenFISH ROGER B·Filed 2008·Granted Apr 3, 2012·2 cites·17 claims
- 0445US2010084117A1Platen cooling mechanism for cryogenic ion implantingFISH ROGER B·Filed 2008·Application pending·0 cites
- 0545US2009305489A1Multilayer electrostatic chuck wafer platenFISH ROGER B·Filed 2008·Application pending·0 cites
- 0640US8998269B2Vacuum insulated fitting enclosureFISH ROGER B·Filed 2012·Granted Apr 7, 2015·0 cites·20 claims
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