Assignee
FONSECA CARLOS A
US·5 granted patents·26 citations·filing 2008–2009
Top patents by PatentIndex Score
5 records- 0188US8129080B2Variable resist protecting groupsFONSECA CARLOS A·Filed 2009·Granted Mar 6, 2012·13 cites·19 claims
- 0281US8197996B2Dual tone development processesFONSECA CARLOS A·Filed 2009·Granted Jun 12, 2012·6 cites·27 claims
- 0378US8283111B2Method for creating gray-scale features for dual tone development processesFONSECA CARLOS A·Filed 2008·Granted Oct 9, 2012·5 cites·11 claims
- 0467US8574810B2Dual tone development with a photo-activated acid enhancement component in lithographic applicationsFONSECA CARLOS A·Filed 2009·Granted Nov 5, 2013·2 cites·20 claims
- 0555US8568964B2Flood exposure process for dual tone development in lithographic applicationsFONSECA CARLOS A·Filed 2009·Granted Oct 29, 2013·0 cites·14 claims
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