Assignee
FREIMANN ROLF
DE·5 granted patents·28 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0191US8908149B2Projection exposure system and use thereofFREIMANN ROLF·Filed 2008·Granted Dec 9, 2014·15 cites·20 claims
- 0278US8537333B2Optical imaging device with image defect determinationFREIMANN ROLF·Filed 2011·Granted Sep 17, 2013·2 cites·23 claims
- 0376US8228485B2Projection illumination systemFREIMANN ROLF·Filed 2008·Granted Jul 24, 2012·7 cites·32 claims
- 0463US8593642B2Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring deviceFREIMANN ROLF·Filed 2012·Granted Nov 26, 2013·2 cites·13 claims
- 0559US8537332B2Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distributionFREIMANN ROLF·Filed 2009·Granted Sep 17, 2013·2 cites·21 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →